O-Rings and Seals
Post-Cleaning and Packaging
on the Surface of Kalrez® Parts Is Dramatically Reduced By
Ultrapure™ Post-Cleaning and Packaging
* Copyright for photograph
DuPont uses the the UltraPure™ (UP) post-cleaning
process for finished Kalrez® parts which gives cleanliness
levels significantly superior to those obtained with processes
used by other perfluoroelastomer manufacturers supplying parts
to the semiconductor industry. Comparative tests were conducted
by an independent third party.
performed on various o-rings showed that Kalrez® UltraPure™
parts cleaned with the DPE proprietary process exhibited significantly
lower residual particle-contamination levels than semiconductor-grade
o-rings from other suppliers---an average of 1.8 particles >1
µm/in2 in size of o-ring surface area (see Table 1).
addition, test results also showed a significant reduction in
contamination (mold-release residues, etc.) (see Table 2) present
on part surfaces, as
evidenced by Electron Spectroscopy for Chemical Analysis (ESCA).
these tests, o-rings of corresponding sizes cleaned with competitive
processes exhibited much higher average particle counts over the
same micron size range: for o-rings cleaned with deionized water,
an average of 19.3 particles >1 µm/in2 in size of o-ring
surface area; for o-rings cleaned with a solvent, an average of
25.1 particles >1 µm/in2 in size of o-ring surface area.
All the o-rings tested were cleaned and packaged in a clean room.
Average Number of Particles per Square Inch of O-Ring Surface
of Particles >1 µm
All clean room packaged
ESCA Analysis—Atom % Excluding Hydrogen
Ideal atom % for the surface area of cleaned Kalrez® parts.
Kalrez UltraPure™ Advantage
to John Legare, senior sales engineer, DPE uses the Ultrapure
process to ensure the highest degree of part cleanliness. "DuPont
[Performance Elastomers] post-cleans all Kalrez® parts for semiconductor
applications," Legare said. According to Legare, the proprietary
post-cleaning process reduces the number of particles >1 µm
in size present on part surface by a factor of 20. As an added
benefit, residual hydrocarbon contamination present on the part
surfaces is also reduced. Because DPE produces polymers, compounds
and finished parts in-house, DPE has complete control over the
entire supply chain. "DuPont [Performance Elastomers] is the
only perfluoroelastomer parts supplier that offers customers this
added advantage," Legare said.
post-cleaning and packaging is performed on Kalrez® parts
as a secondary operation in a Class 100 clean room. Parts are
cleaned using a proprietary process, followed by multiple rinses
in UPDI water, and then dried under a filtered airstream. For
quality control, the parts are subjected to particle-count testing
as a measure of surface cleanliness. Finally, the parts are sealed
in certified-clean, antistatic packaging material and shipped
double-bagged, permitting easy clean room use by OEMs and fablines.
The inner bag is labeled to ensure full part traceability.
UltraPure™ Parts Availability
post-cleaning and packaging is standard for all Kalrez® semiconductor
compounds. It is optional for Kalrez® 4079, Kalrez® 2037
and Kalrez® 1050LF. For these compounds, ultrapure post-cleaning
and packaging can be specified by adding a "UP" suffix
to the compound designation (e.g., Kalrez® 4079UP).
information set forth herein is furnished free of charge and is
based on technical data that DuPont and
Problem Solving Products, Inc. believe to be reliable. It is intended
for use by persons having technical skill, at their own discretion
and risk. Handling precaution information is given with the understanding
that those using it will satisfy themselves that their particular
conditions of use present no health or safety hazards. Since conditions
of product use and disposal are outside of our control, we make
no warranties, express or implied, and assume no liability in
connection with any use of this information. As with any material,
evaluation of any compound under end-use conditions prior to specification
is essential. Nothing herein is to be taken as a license to operate
or a recommendation to infringe on any patents. While the information
presented here is accurate at the time of publication, specifications
can change. Check with us before making a decision about which
product to use.
is a registered trademark of DuPont
* Photograph ©
Can Stock Photo Inc.| Uatp1