Common Polymers in Semiconductor
Process Equipment

ASTM	Polymer	Trade Names	Monomers
PLASTICS
	Polyamideimide (PAI)	TORLON®
	Polybenzimidazole (PBI)	CELAZOLE®	-(C7H6N2)-
	Polycarbonate (PC)		-COOC6H5C(CH3)2C6H5O-
	Polyethylene (PE)		-CH2CH2-
	Polyetheretherketone (PEEK)	KETRON®	-C6H5-CO-C6H5-O-C6H5-
	Polyetherimide (PEI)	ULTEM®
	Polyimide (PI)	DURATRON®	N(C2O2)C6H5(C2O2)N-R-
	Polypropylene (PP)		CH2CH(CH3)-
	Polyphenylenesulfide (PPS)	TECHTRON®
	Polyvinylidine Fluoride (PVDF)		-CH2CF2-
	Fluorinated Ethylene-Propylene (FEP)	TEFLON® FEP	-CF2CF2-CF2CF(CF3)-
	Perfluoroalkoxy (PFA)	TEFLON® PFA	-CF2CF2-CF2CF(OCF3)-
	Polytetrafluoroethylene (PTFE)	TEFLON® PTFE	-CF2CF2-
ELASTOMERS
NBR	Nitrile (Buna-N)	PARACRIL®, CHEMIGUM®	-CH2CH=CH(CH2)2CHCH(CN)-
EPDM	Ethylene-Propylene Diene	VISTALON®, NORDEL®	-CH2CH2-CH2CH(CH3)-
VMQ	Silicone	SILASTIC®, SILPLUS®	-OSi(CH3)2-OSi(CH3)(CH=CH2)-
FVMQ	Fluorosilicone	SILASTIC® LS, FSE®	-OSi(CH3)(CH=CH2)- OSi(CH3)(CH2CH2CF3)-
FKM	Fluoroelastomer	A VITON®, FLUOREL®	-CH2CF2-CF2CF(CF3)-
	Fluoroelastomer B		-CH2CF2-CF2CF(CF3)-CF2CF2-
	Fluoroelastomer GF		-CH2CF2-CF2CF(OCF3)-CF2CF2-
	Fluoroelastomer ETP	VITON®, ETP®	-CF2CF2-CF2CF(OCF3)-CH2CH2-
	Fluoroelastomer TFE/P	AFLAS®	-CF2CF2-CH2CH(CH3)-
FFKM	Perfluoroelastomer (PFE)	AEGIS® CHEMRAZ®	-CF2CF2-CF2CF(OCFnCF3)-
OTHER
	VF2/CTFE	KEL-F®	-CH2CF2-CF2CFCl-