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Home > Elastomers > Semiconductor Polymers

Common Polymers in Semiconductor
Process Equipment

 

ASTM
Polymer
Trade Names
Monomers
PLASTICS    
Polyamideimide (PAI) TORLON®  
  Polybenzimidazole (PBI) CELAZOLE® -(C7H6N2)-
  Polycarbonate (PC)   -COOC6H5C(CH3)2C6H5O-
  Polyethylene (PE)   -CH2CH2-
  Polyetheretherketone (PEEK) KETRON® -C6H5-CO-C6H5-O-C6H5-
  Polyetherimide (PEI) ULTEM®  
  Polyimide (PI) DURATRON® N(C2O2)C6H5(C2O2)N-R-
  Polypropylene (PP)   CH2CH(CH3)-
  Polyphenylenesulfide (PPS) TECHTRON®  
  Polyvinylidine Fluoride (PVDF)   -CH2CF2-
  Fluorinated Ethylene-Propylene (FEP) FEP -CF2CF2-CF2CF(CF3)-
  Perfluoroalkoxy (PFA) PFA -CF2CF2-CF2CF(OCF3)-
  Polytetrafluoroethylene (PTFE) PTFE -CF2CF2-
ELASTOMERS    
NBR Nitrile (Buna-N) PARACRIL®, CHEMIGUM® -CH2CH=CH(CH2)2CHCH(CN)-
EPDM Ethylene-Propylene Diene VISTALON®, NORDEL® -CH2CH2-CH2CH(CH3)-
VMQ Silicone SILASTIC®, SILPLUS® -OSi(CH3)2-OSi(CH3)(CH=CH2)-
FVMQ Fluorosilicone SILASTIC® LS, FSE® -OSi(CH3)(CH=CH2)-
OSi(CH3)(CH2CH2CF3)-
FKM Fluoroelastomer A VITON®, FLUOREL® -CH2CF2-CF2CF(CF3)-
  Fluoroelastomer B   -CH2CF2-CF2CF(CF3)-CF2CF2-
  Fluoroelastomer GF   -CH2CF2-CF2CF(OCF3)-CF2CF2-
  Fluoroelastomer ETP VITON®, ETP® -CF2CF2-CF2CF(OCF3)-CH2CH2-
  Fluoroelastomer TFE/P AFLAS® -CF2CF2-CH2CH(CH3)-
FFKM Perfluoroelastomer (PFE) AEGIS® -CF2CF2-CF2CF(OCFnCF3)-
OTHER    
  VF2/CTFE KEL-F® -CH2CF2-CF2CFCl-

Viton® was a registered trademark of DuPont at the time the article was written and is now a registered trademark of the Chemours Company.

 

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