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SaharaTM Plasma 8575 From Dupont Dow Elastomers Runs O-Rings Around
to Problem Solving Products about Kalrez® o-rings and
Release from DuPont (formerly named Dupont Dow Elastomers when this article was written)
new, white perfluoroelastomer compound and companion crosslinking
system developed by DuPont Dow Elastomers is setting the standard
for sealing success in aggressive plasma applications.
Copyright for photograph
Sahara Plasma 8575, a proprietary compound formulated especially
for plasma processes, assures semiconductor manufacturers the highest
level of sealing integrity by maintaining the optimum balance between
weight loss and particle generation.
maximum continuous service rating of Kalrez® Sahara Plasma 8575
is 280C, well above typical requirements for plasma applications.
Designed for use in all types of etch, CVD and stripping processes,
Kalrez® Sahara Plasma 8575 offers the best combination of chemical
resistance and sealing performance in an elastomer material.
Reveals Performance Advantages
Sahara Plasma 8575 outperformed competitive materials and other
Kalrez® compounds in tests DuPont Dow developed to approximate
typical commercial plasma processing conditions. These tests enabled
DuPont Dow to quantify seal resistance to plasma by placing O-rings
on a silicon wafer in a process chamber and exposing them directly
to the most damaging plasma environments.
Dow pioneered the design of the performance tests because no industry
standard existed to characterize elastomer resistance to plasma.
Stay in Shape
made of Kalrez® Sahara Plasma 8575 also show the best long-term
compression set and elastic recovery properties of the sealing materials
tested. Rapid elastic recovery enables a seal to regain shape quickly
and be ready for service faster between process cycles or planned
addition, Kalrez® Sahara Plasma 8575 exhibits other key performance
characteristics that contribute to extended seal life, including
its resistance to oxygen and fluorine-based plasma, and its ability
to withstand new, aggressive cleaning gasses, such as ClF3.
well-suited for slit valve doors, chamber lids, gas inlets, quartz
windows and throttle valves, Kalrez® Sahara Plasma 8575 combines
physical characteristics that allow fabricators to maintain proper
pressure, temperature and gas concentration in single- or multi-chamber
DuPont Dow Elastomers and DuPont Kalrez® Sahara
Dow Elastomers, a global supplier of specialty elastomers with headquarters
in Wilmington, Delaware, USA, is a joint venture between the DuPont
Company and The Dow Chemical Company, with more than US $1 billion
in sales. The company is the industry leader in chloroelastomers,
ethylene elastomers and fluorinated elastomers, serving the automotive,
chemical processing, construction, general rubber and wire and cable
is a registered trademark of DuPont.
article, "Kalrez® Sahara Plasma 8575 From Dupont Dow
Elastomers Runs O-Rings Around The Competition," was provided
* Photograph © NASA
* Photograph ©
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