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New Kalrez® Sahara™ 8475 Meets The Semicon Sealing Challenge At High Temperatures

Talk to Problem Solving Products about Kalrez® o-rings and seals for high temperatures.

News Release from Dupont Dow Elastomers

4/1/2000

* Copyright for photograph

Following many years of success with Kalrez® 4079, the industry's leading high temperature perfluoroelastomer, DuPont Dow Elastomers introduces new Kalrez® Sahara 8475, adding much lower IR absorption and negligible outgassing at temperatures up to 300°C to the excellent heat resistance of 4079. According to the company, this is the first time that superior long-term sealing performance at high temperatures has been combined with minimal outgassing - performance advantages that can improve yields in challenging semiconductor fab processes such as LPCVD, RTP and Lamp Anneal, and reduce cost of ownership.

OEMs and fab lines that have tested Kalrez® Sahara 8475 claim significantly lower contamination and improved seal performance, DuPont Dow reports. Several major OEMs have already standardized on the new product for their high temperature sealing applications, including quartz tube, ball joint, gas feedthrough, plenum and bell jar seals.

The development is significant, says DuPont Dow, because high temperature and elevated heat spikes can cook elastomeric seals making them hard and brittle. This loss of elasticity makes effective sealing impossible. In addition, elastomer ingredients can degrade under high temperatures, causing outgassing and contamination of the process environment, which can lead to downtime and loss of wafer yield.

Rapid thermal processing (RTP), LPCVD, diffusion, lamp annealing, etc., demand seals that resist aggressive process chemicals and extreme temperatures. Long-term tests for sealing force retention and compression set (700 hours or one month) are the only sure way to predict seal performance in actual service.

According to DuPont Dow Elastomers, Kalrez® Sahara 8475 significantly reduces the risk of costly seal failure and contamination in such critical semiconductor processing conditions. The new perfluoroelastomer parts also reduce the cost of ownership by offering long-term sealing performance at high temperatures combined with minimal outgassing - a balance of properties previously unheard of in a white product.

About DuPont Dow Elastomers

DuPont Dow Elastomers, a global supplier of specialty elastomers with European headquarters in Geneva, Switzerland, is a joint venture between the DuPont Company and The Dow Chemical Company, with more than US $1 billion in sales. The company is the industry leader in chloroelastomers, ethylene elastomers and fluorinated elastomers, serving the automotive, chemical and pharmaceutical processing, construction, general rubber and wire and cable industries.

Kalrez® is a registered trademark of DuPont Dow Elastomers

Kalrez® Sahara is a trademark of DuPont Dow Elastomers

To talk about Kalrez® o-rings and seals for high temperatures, call Problem Solving Products at (303) 758-2728.

News Release: New Kalrez® Sahara™ 8475 Meets The Semicon Sealing Challenge At High Temperatures provided by DuPont Dow Elastomers

Next Article: Article 1: Kalrez® SaharaTM Plasma 8575 From Dupont Dow Elastomers Runs O-Rings Around The Competition