News 1 - Article 6
Elastomers Features New Kalrez® UltraPure Perfluoroelastomer
Parts At SEMICON West
to Problem Solving Products about Kalrez® o-rings and
Release from DuPont (Formerly named DuPont Dow Elastomers when this article was written)
Copyright for photograph
Kalrez® 6375 UltraPure (UP) perfluoroelastomer parts
from DuPont Dow Elastomers offer the best overall performance
characteristics - including exceptionally low contamination -
in wet fabrication environments for today's chip-making processes.
DuPont Dow is featuring the new Kalrez® 6375UP parts at SEMICON
West 2001 July 16 - 18, 2001, at the Moscone Center in San Francisco,
Calif., Booth #6344.
6375UP resists all wet process chemicals, including acids, amines
and bases. These chemicals can attack elastomeric seals, causing
them to swell and degrade or to leach undesirable metallic and ionic
extractables that affect integrated circuit functionality. With
Kalrez® 6375UP, DuPont Dow has minimized the potential for wafer
contamination with trace chemicals (anions and total organic carbons
- TOCs), metallic ions and particles.
physical properties of Kalrez® 6375UP include good mechanical
strength and compression set properties at continuous service temperatures
up to 275° C.
UltraPure compounds offer long-term seal integrity, leading
to reduced maintenance and increased wafer yields in aggressive
fab processes that cause premature failure in other seals. Kalrez®
UltraPure parts are specially cleaned and double-packaged
in Class 100 workstations to reduce contamination. The post-cleaning
process can reduce, by a factor of 20, the number of particles greater
than 1 micron in size on the part surface.
of Kalrez® have the assurance of quality and traceability of
all parts made at the company's ISO 9001/9002 and AS 9000-registered
facilities in the U.S. and Japan. No other high-performance seal
manufacturer offers this total control over product quality and
DuPont Dow Elastomers
Dow Elastomers, a global supplier of specialty elastomers with headquarters
in Wilmington, Delaware, USA, is a joint venture between the DuPont
Company and The Dow Chemical Company, with more than $1 billion
(USD) in sales. The company is the industry leader in chloroelastomers,
ethylene elastomers and fluorinated elastomers, serving the automotive,
chemical processing, construction, general rubber and wire and cable
note: DuPont Dow Elastomers is always to be cited by its full name
in the first reference. For all references thereafter, the company
may be cited as DuPont Dow.
is a registered trademark of DuPont.
Sahara and Kalrez® UltraPure are trademarks of
© Photographer: Lars Sundström of Lund, Skane, Sweden | Agency:
Article: Article 5: ITT Richter Chooses FDA-Compliant Kalrez®
To Seal Ultra-Pure Pharmaceutical Process Pumps