News 1 - Article 15
Introduces Kalrez® Bonded Door Seals; Seals Provide Improved
Sealing Performance, Easy Installation
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Release from DuPont (Formerly named DuPont Dow Elastomers when this article was written)
Dow is introducing Kalrez® bonded door seals at Semicon
West 2003 . The seals are designed for easy installation
and low particle generation.
* Copyright for photograph
DuPont Dow Elastomers is introducing bonded door
seals made with Kalrez® perfluoroelastomer parts at Semicon
West 2003 in San Francisco.
The bonded door seals not only outperform conventional
O-rings for slit and gate valve door seal applications but counter
unique problems posed by O-rings. They extend seal life and reduce
replacement time during preventive maintenance.
The new bonded door seals will be featured along
with Kalrez® Sahara™ 8085 from DuPont Dow at the company's
booth (No. 6344) in North Hall at Moscone Convention Center.
Masato Chida, Global Semicon Marketing Manager
- Kalrez®, said "DuPont Dow continues to advance sealing
technology. The design of our bonded door seals and the performance
of Kalrez® Sahara™ 8085 combine for improved sealing
As an example of optimal seal design, Kalrez®
bonded door seals are held in a 'fixed' position unlike conventional
O-rings, which reduces rolling and twisting during door actuation.
The seal design also has been optimized using finite element analysis
(FEA) to minimize high concentrations of localized stresses. As
a result, both particle generation and sealing performance are
improved significantly over O-rings.
In addition, Kalrez® bonded door seals offer
quick and easy assembly/disassembly to mounting bracket; eliminate
the need to clean the gland during preventive maintenance after
the O-ring has been removed; reduce installation problems such
as misalignment, and ensure full part traceability with barcode
The seals also combine a custom seal design along
with the excellent plasma resistance of Kalrez® Sahara™
8085. The seals are available in Kalrez® Sahara™ 8085
for Etch, Ash, HDPCVD, PECVD, SACVD and metal CVD wafer processing
Kalrez® Sahara™ 8085 was developed specifically
for very low particle generation and low weight loss in various
applications. Customers say that Kalrez® Sahara™ 8085
has improved wafer yield, in some case, up to 200 percent in applications
where highly aggressive environments like NF3 plasma is used in
It has not only demonstrated excellent mechanical
properties, but also is well-suited for both static and dynamic
sealing applications such as bonded slit valve doors, bonded gate
valve doors, gas inlets, gas orifice seals and gas feed-through
DuPont Dow Elastomers
DuPont Dow Elastomers, a global supplier of specialty
elastomers with global headquarters in Wilmington, Delaware, is
a joint venture between the DuPont Company and The Dow Chemical
Company with more than US $1 billion in sales. The company is
the industry leader in chloroelastomers, ethylene elastomers and
fluorinated elastomers, serving the automotive, chemical, construction,
general rubber and wire and cable industries.
Kalrez® is a registered trademark of DuPont.
is a registered trademark of DuPont.
© Photographer: DuPont Performance Elastomers
Article: Article 14: DuPont Dow Introduces Kalrez® Bonded Door
Seals; Seals Provide Improved Sealing Performance, Easy Installation