News 1 - Article 11
Elastomers Features New, Low Particle Generation Kalrez® Seals
At SEMICON West
to Problem Solving Products about Kalrez® o-rings and
seals. Call (303) 758-2728 for instant help with your sealing
Release from DuPont (Formerly named DuPont Dow Elastomers when this article was written)
* Copyright for photograph
Dow Elastomers continues to advance sealing technology with the
development of new seals to enhance performance in highly aggressive
environments like NF3 and oxygen plasma. Kalrez® Sahara™
8085, featured at Semicon West 2002, is a new compound specifically
developed for very low particle generation and low weight loss
in HDPCVD, PECVD, etc.
"NF3 is an efficient etching tool and a product
of choice for many semiconductor chip fabricators, but under certain
operating conditions may be damaging to elastomeric seals. We
developed Kalrez® Sahara™ 8085 with NF3 plasma in mind."
says Masato Chida, Global Semicon Marketing Manager - Kalrez®.
"Customers who have used Kalrez® Sahara™ 8085 claim
that it has improved wafer yield, in some cases, up to two hundred
percent in applications where NF3 plasma is used for cleaning."
It has demonstrated excellent mechanical properties, and is well-suited
for both static and dynamic sealing applications such as bonded
slit valve doors, bonded gate valves, gas inlets, gas orifice
seals and gas feed-through seals claims Chida.
Kalrez® Sahara™ 8085 complements Kalrez®
Sahara™ 8575 to help improve productivity and increase wafer
yields, while delivering extended seal life and reduced particle
generation, according to the company.
Also introduced at Semicon West is Kalrez®
8002 a new specialty product designed for select plasma and gas
deposition processes where ultra low particle generation is required.
This unfilled compound offers lower contamination and reduced
particle generation than filled compounds. Kalrez® 8002 exhibits
excellent resistance to plasmas and gas deposition chemistries,
has good mechanical properties and is well suited for static and
low sealing force applications.
DuPont Dow's "wet range" of Kalrez®
perfluoroelastomer compounds has been strengthened significantly
by the addition of Kalrez® 6375UP. This perflouroelastomer
compound resists all wet process chemicals, amine-base strippers,
acids and bases, and displays good mechanical strength and compression
set properties at continuous service temperatures up to 275°C.
Kalrez® UltraPure™ perfluoroelastomer
parts are produced only by DuPont Dow Elastomers and are specially
cleaned and double packaged in Class 100 Workstations to significantly
reduce contamination. Each item is individually packaged in a
bar-coded bag for full traceability and is available as O-rings,
sheets, and custom parts.
DuPont Dow Elastomers
DuPont Dow Elastomers, a global supplier of specialty
elastomers with global headquarters in Wilmington, Delaware, is
a joint venture between the DuPont Company and The Dow Chemical
Company, with more than US $1 billion in sales. The company is
the industry leader in chloroelastomers, ethylene elastomers and
fluorinated elastomers, serving the automotive, chemical, construction,
general rubber and wire and cable industries.
Kalrez® is a registered trademark of DuPont.
Kalrez® Sahara™ and Kalrez® UltraPure™
are trademarks of DuPont.
© Photographer: Jayesh Nair of Mumbai, Maharashtra, India
| Agency stock.XCHNG
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