Kalrez® News 2 - Article 1

Kalrez® Sahara™ 8085 Offers Significantly Reduced Particle Generation For Semiconductor Manufacturers

Kalrez® Sahara™ 8085 perfluoroelastomer parts, developed by DuPont Dow Elastomers, are helping semiconductor manufacturers dramatically reduce particle generation in processing silicon wafers, according to reports by major Fablines.

In a High-Density Plasma Chemical Vapor Deposition (HDPCVD) process at a U.S. Fabline, Kalrez® Sahara™ 8085 O-rings lowered particle adders by 53% versus a competitive perfluoroelastomer. In another comparison, Kalrez® Sahara™ 8085 bonded door seals reduced particle adders by 51% over a competitive perfluoroelastomer bonded door seal in a tungsten Chemical Vapor Deposition (CVD) process. As a result, Kalrez® Sahara™ 8085 bonded door seals were adopted in all tungsten CVD toolsets and recommended for adoption in etch toolsets as well.

In both cases, Kalrez® Sahara™ 8085 significantly reduced particle generation and improved equipment reliability in both HDPCVD and tungsten CVD processes. The test results will be available at Semicon West in San Francisco, July 12 to 14. The DuPont Dow booth number at the show is 1102.

Kalrez® Sahara™ 8085 was specifically formulated for minimal particle generation in nitrogen fluoride (NF3) plasma and for low weight loss in oxygen and fluorine plasma. Kalrez® Sahara™ 8085 is suggested for use in HDPCVD, Plasma Enhance Chemical Deposition (PECVD) and Sub Atmospheric Chemical Deposition (SACVD) processes.

DuPont Dow has developed a number of different Kalrez® compounds that provide outstanding performance and meet the unique challenges of various semiconductor manufacturing processes.

About DuPont Dow Elastomers

DuPont Dow Elastomers, a global supplier of specialty elastomers with headquarters in Wilmington, Del., is a joint venture between the DuPont Company and The Dow Chemical Company, with more than $1 billion in sales. The company is an industry leader in chloroelastomers, ethylene elastomers and fluorinated elastomers, serving the automotive, chemical, construction, general rubber, plastics and wire and cable industries.

Kalrez® is a registered trademark of DuPont.

Kalrez® Sahara™ is a registered trademark of DuPont.

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