News 2 - Article 1
Sahara™ 8085 Offers Significantly Reduced Particle Generation
For Semiconductor Manufacturers
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Release from DuPont (formerly named Dupont Dow Elastomers when this article was written)
Kalrez® Sahara™ 8085 perfluoroelastomer
parts, developed by DuPont Dow Elastomers, are helping semiconductor
manufacturers dramatically reduce particle generation in processing
silicon wafers, according to reports by major Fablines.
In a High-Density Plasma Chemical Vapor Deposition
(HDPCVD) process at a U.S. Fabline, Kalrez® Sahara™
8085 O-rings lowered particle adders by 53% versus a competitive
perfluoroelastomer. In another comparison, Kalrez® Sahara™
8085 bonded door seals reduced particle adders by 51% over a competitive
perfluoroelastomer bonded door seal in a tungsten Chemical Vapor
Deposition (CVD) process. As a result, Kalrez® Sahara™
8085 bonded door seals were adopted in all tungsten CVD toolsets
and recommended for adoption in etch toolsets as well.
In both cases, Kalrez® Sahara™ 8085
significantly reduced particle generation and improved equipment
reliability in both HDPCVD and tungsten CVD processes. The test
results will be available at Semicon West in San Francisco, July
12 to 14. The DuPont Dow booth number at the show is 1102.
Kalrez® Sahara™ 8085 was specifically
formulated for minimal particle generation in nitrogen fluoride
(NF3) plasma and for low weight loss in oxygen and fluorine plasma.
Kalrez® Sahara™ 8085 is suggested for use in HDPCVD,
Plasma Enhance Chemical Deposition (PECVD) and Sub Atmospheric
Chemical Deposition (SACVD) processes.
DuPont Dow has developed a number of different
Kalrez® compounds that provide outstanding performance and
meet the unique challenges of various semiconductor manufacturing
DuPont Dow Elastomers
DuPont Dow Elastomers, a global supplier of specialty
elastomers with headquarters in Wilmington, Del., is a joint venture
between the DuPont Company and The Dow Chemical Company, with
more than $1 billion in sales. The company is an industry leader
in chloroelastomers, ethylene elastomers and fluorinated elastomers,
serving the automotive, chemical, construction, general rubber,
plastics and wire and cable industries.
is a registered trademark of DuPont.
Sahara™ is a registered trademark of DuPont.
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