Kalrez® News 2 - Article 12
DuPont™ Kalrez®, Zalak® and Vespel® parts help improve equipment yield at a lower cost of ownership
High performance parts from DuPont that help Semiconductor Fabs and OEMs improve equipment yield at a lower cost of ownership were presented at Semicon Europa 2010 in Dresden. Featured products included DuPont™ Kalrez® 9100 parts for exceptional seal performance, DuPont™ Zalak® seals that bridge the performance gap between perfluoroelastomer (FFKM) and fluoroelastomer (FKM) parts, and DuPont™ Vespel® parts and shapes, an alternative to ceramics, quartz and other plastics parts.
Fabs report extended seal life with Kalrez® 9100
Kalrez® 9100 perfluoroelastomer parts offer the highest performance in etching, deposition and "select" ashing/stripping processes to reduce planned maintenance (PM) and increase uptime. In such environments, they demonstrate unusually long life, help cut costly downtime and reduce cost of ownership. A 300mm Fab in Asia Pacific achieved consistent and improved seal performance with Kalrez® 9100 parts in Applied Materials® Producer® SE PECVD low k equipment. It adopted Kalrez® 9100 O-rings for gas lid assembly seals and was qualifying it for other locations in the same toolset.
Zalak® seals bridge the performance gap between FFKM and FKM parts
Zalak® high performance seals joined Kalrez® parts earlier this year as a sealing alternative and a cost-efficient solution in plasma processing. "Zalak® seals bridge the performance gap between perfluoroelastomer and fluoroelastomer parts, and should be specified when standard FKM seals are underperforming or when preventive maintenance (PM) dictates the need for frequent seal replacement" said Dr. Michele Vigliotti, European lead for Electronics - Kalrez® and Vespel® business. "They were developed to meet the requirements in PVD, plasma etching and select CVD applications," he continued. Zalak® 5100 seals are recommended for dynamic processing applications and Zalak® 5500 seals are for static applications. Zalak® 5300 seals were developed for use in PV thin film static sealing applications.
Vespel® parts and shapes for substrate handling, system insulation and IC handling/testing
Presented for the first time at Semicon Europa, Vespel® parts and shapes offer an alternative to ceramics, quartz and other plastics and contribute to improved processes in substrate handling, system insulation, and IC handling and testing. They demonstrate superior wear and friction characteristics, heat resistance up to 350°C, a high dimensional stability, low outgassing and very low particles emission. Vespel® parts are available as pins, rings, guides, clamps, rollers, ball transfer units, end effectors, pads, screws, fasteners, test sockets.
The DuPont Performance Polymers business manufactures and sells Crastin® PBT and Rynite® PET thermoplastic polyester resins, Delrin® acetal resins, Hytrel® thermoplastic polyester elastomers, DuPont™ ETPV engineering thermoplastic vulcanizates, Minlon® mineral reinforced nylon resins, Neoprene polychloroprene, Tynex® filaments, Vespel® parts and shapes, Kalrez® perfluoroelastomer parts, Vamac® ethylene acrylic elastomers (AEM), Viton® fluoroelastomers, Viton® FreeFlow™ processing aids, Zytel® nylon resins and Zytel® HTN high-performance polyamides. These products serve global markets in the aerospace, appliance, automotive, consumer, electrical, electronic, healthcare, industrial, sporting goods and many other diversified industries.
DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 90 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation.
All products denoted with ® or ™ are registered trademarks or trademarks of E. I. du Pont de Nemours and Company or its affiliates.