News 2 - Article 4
Elastomers Spearheads Semicon Successes With Kalrez® Sahara™
8085 And Bonded Door Seals
to Problem Solving Products about purchasing a Kalrez®
Release from DuPont (formerly named Dupont Performance Elastomers when this article was written)
At Semicon Europa 2006, DuPont Performance Elastomers
focused on two key products from its range of Kalrez® perfluoroelastomer
parts for semicon Fab line sealing — Kalrez® Sahara™
8085 for reduced particle adders and improved equipment reliability
in CVD processes, and Kalrez® Bonded Door Seals for CVD, etch
and ashing in 200mm and 300mm wafer production equipment platforms.
In 2005, these products spearheaded the company’s growth
in the semicon sector. DuPont Performance Elastomers also revealed
details of KLR 9100, an advanced compound for Kalrez® perfluoroelastomer
parts offering minimal particles for next generation chips.
Kalrez® Sahara™ 8085 and Kalrez®
Bonded Door Seals complement the company’s "dry to
wet” range of perfluoroelastomer sealing parts that includes
Kalrez® Sahara™ 8575, Kalrez® 8002, Kalrez®
7075UP, Kalrez® Sahara™ 8475 and Kalrez® 6375UP,
and offers a sealing product for every key semicon fab process.
Each is designed to withstand semiconductor process media, including
reactive plasmas, at temperatures as high as 327°C, while
helping fabricators reduce particle generation and cut costly
downtime in silicon wafer processing.
its introduction in 2002, Kalrez® Sahara™ 8085 has become
a proven success by helping Fab lines to significantly reduce
particle adders and improve equipment reliability in HDPCVD, SACVD,
PECVD, tungsten CVD and etching processes," said Martin Vaughan,
marketing manager Europe – Kalrez® Semiconductor Industry.
"Kalrez® Sahara™ 8085 was also
developed to resist NF3 plasma, a cleaning gas that can damage
elastomeric seals. Some customers who use this particularly aggressive
plasma for cleaning have reported as much as 200 per cent improved
wafer yield since switching to Kalrez® Sahara™ 8085.”
Bonded Door Seals offer significantly increased yield and
particle reduction benefits in CVD, etch and ashing processes
for key 200mm and 300mm wafer production equipment platforms,
claims DuPont Performance Elastomers. The MONOVAT® door
seal with KLR 9100, seen here, enabled a leading chip manufacturer
to almost double wafer yield.
launched at Semicon Europa 2004, Kalrez® Bonded Door Seals
have already been adopted by several leading Fab lines to seal
CVD, etch and ashing processes for the key 200mm and 300mm wafer
production equipment platforms, and report significant benefits,"
He cited a leading European chip manufacturer
that almost doubled wafer yield from about 30 000 to 55 000 pairs
in a Producer low-k Black Diamond PECVD process by switching to
MONOVATâ bonded door seals with KLR 9100. KLR 9100, the
latest perfluoroelastomer compound from DuPont Performance Elastomers,
significantly lowered particle generation in the process.
Vaughan also reported that a major Southwest USA
Fab line achieved 51 per cent particle reduction by switching
to Kalrez® Sahara™ 8085 Bonded Door Seals in a tungsten
Performance Elastomers claims that Kalrez® Bonded Door Seals
outperform conventional O-rings in slit and gate valve door seal
applications, and also reduce rolling and twisting during door
actuation due to being held in a 'fixed' position. These innovations
can lead to extended seal life and reduced replacement time during
preventive maintenance, the company states.
Kalrez® Sahara™ 8085 Bonded Door Seals
are designed for HDPCVD, PECVD, SACVD, low-K CVD and metal CVD
as well as etch and ash wafer processing applications.
perfluoroelastomer parts manufacture
All Kalrez® perfluoroelastomer parts are produced
only by DuPont Performance Elastomers and are specially cleaned
and double packaged in Class 100 Workstations to significantly
reduce the potential for contamination. Each item is individually
packaged in a bar coded bag for full traceability and is available
as O-rings, sheets, and custom parts.
Jane E. Austin, global business director for DuPont
Performance Elastomers' chloroelastomers business, has been elected
the Society of the Plastics Industry's (SPI) 2006 chairperson,
becoming the first woman to head the nation’s leading plastics
industry group. Founded in 1937, The Society of the Plastics Industry
represents one of the largest manufacturing industries in the
DuPont Performance Elastomers
DuPont Performance Elastomers, a global supplier
of specialty elastomers with headquarters in Wilmington, Delaware,
USA, is a wholly owned subsidiary of DuPont. The company is an
industry leader in chloroelastomers and fluorinated elastomers,
serving the automotive, chemical, petrochemical, semiconductor,
food and pharmaceutical processing, construction, general rubber
and wire and cable industries.
is a registered trademark of DuPont.
Sahara™ is a registered trademark of DuPont.
Article: Article 3: DuPont Performance Elastomers Provices A To
Z Of Critical CPI Sealing With Viton® And Kalrez®