News 2 - Article 7
DuPont Performance Elastomers Kalrez® 9100 parts Surpass
Planned Maintenance Standards, increase Uptime, improve Wafer
to Problem Solving Products about purchasing Kalrez®
o-rings and seals.
Release from DuPont (formerly named Dupont Performance Elastomers when this article was written)
Performance Elastomers Kalrez® 9100 perfluoroelastomer parts
are specifically designed for ultra-low contamination in aggressive
plasma environments. Kalrez® 9100 parts demonstrate unusually
long life in the harshest semiconductor manufacturing processes
to help cut costly downtime and reduce cost of ownership.
and dynamic sealing applications in deposition as well as select
etch and ash processes, Kalrez® 9100 parts offer performance
that surpasses industry maintenance standards for greater equipment
uptime. A combination of properties effectively extends seal life,
produces higher quality chips and greater yields. Kalrez®
9100 parts have:
- low erosion
and ultra-low particle generation
- very low
outgassing and metals content
resistance to dry process chemistry, including oxygen and fluorine
thermal stability with maximum continuous service temperature
of 300°C and the standard offering is a Kalrez® UltraPure™
Copyright for photograph
9100 parts have been tested in a variety of demanding semiconductor
process applications where oxygen and fluorinated plasmas are
used during the cleaning cycle. In a number of customer evaluations,
they exhibited less erosion, lower particle generation and longer
seal life compared to competitive perfluoroelastomer parts in
both static and dynamic sealing applications. Kalrez® 9100
parts significantly extended PM cycle time from two to three times
in HDPCVD, PECVD, etching and ashing applications. "Kalrez®
9100 parts were developed to meet the requirement for extremely
high resistance to erosion in aggressive plasma environments"
says Steve Metaxas, DPE global semiconductor manager. The formulation
used in "Kalrez® 9100 parts is completely polymeric so
particle generation is ultra low. It helps reduce maintenance
costs and allows for greater equipment uptime. This improved quality
results in significantly higher wafer yields."
Elastomers is committed to the global semiconductor market. For
more than 75 years, product development and technical expertise
have helped introduce a broad product offering across major processes.
Kalrez® 9100 parts for aggressive plasma environments complement
the company’s offering of its dry-to-wet range of perfluorelastomer
parts – Kalrez® Sahara™ 8085, Kalrez® 8002,
Kalrez® 7075UP, Kalrez® Sahara™ 8475, and Kalrez®
6375UP – proven performers in silicon wafer processing.
Elastomers also has integrated manufacturing back to the polymer,
enhancing quality control and product development. Kalrez®
parts are manufactured in ISO 9000 registered facilities and are
available in a wide variety of finished products from conventional
seal shapes and bonded door seals to custom geometrics. Kalrez®
perfluorelastomer parts are specially cleaned and double packaged
in Class 100 workstations to significantly reduce the potential
for contamination. Each item is individually packaged in a bar-coded
bag for full traceability and is available as O-rings, sheets,
and custom parts.
DuPont Performance Elastomers
Elastomers, a global supplier of specialty elastomers with headquarters
in Wilmington, Del., is a wholly owned subsidiary of DuPont. The
company is an industry leader in chloroelastomers and fluorinated
elastomers, serving the automotive, chemical, petrochemical, semiconductor,
food and pharmaceutical processing construction, general rubber
and wire and cable industries.
is a registered trademark of DuPont.
* Photograph ©
Can Stock Photo Inc. | zurijeta
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Successes With Kalrez® Seals