News 2 - Article 6
DuPont Performance Elastomers Spearheads Semicon Successes With
West July 11-13 – South Hall, Booth 2426
to Problem Solving Products about purchasing a Kalrez®
Release from DuPont (formerly named Dupont Performance Elastomers when this article was written)
At Semicon West 2006, DuPont Performance Elastomers
will focus on its range of Kalrez® perfluoroelastomer parts
for reduced particle adders and improved equipment reliability
in Etch and CVD processes. Kalrez® Sahara™ 8085, Kalrez®
8002 and Kalrez® Bonded Door Seals are proven to improve seal
performance in the most aggressive process environments.
Kalrez® Sahara™ 8085, Kalrez® 8002
and Kalrez® Bonded Door Seals complement the company's "dry
to wet" range of perfluoroelastomer sealing parts that includes
Kalrez® 7075UP, Kalrez® Sahara™ 8475 and Kalrez®
6375UP, and offers a sealing product for every key semicon fab
process. Each is designed to withstand semiconductor process media,
including reactive plasmas, while helping fabricators reduce particle
generation and cut costly downtime in silicon wafer processing.
Kalrez® Bonded Door Seals offer significantly
increased yield and particle reduction benefits in CVD, etch
and ashing processes for key 200mm and 300mm wafer production
equipment platforms, claims DuPont Performance Elastomers.
The MONOVAT® door seal with KLR 9100, seen here, enabled
a leading chip manufacturer to almost double wafer yield.
Seals in Etch, Ash and CVD
"Since its introduction in 2002, Kalrez®
Sahara™ 8085 has become a proven success by helping Fab
lines to significantly reduce particle adders and improve equipment
reliability in HDPCVD, SACVD, PECVD, tungsten CVD and etching
processes," claims Steve Metaxas, global marketing manager
– Kalrez® Electronics Industry.
"Kalrez® Sahara™ 8085 was also
developed to resist NF3 plasma, a cleaning gas that can damage
elastomeric seals. Some customers who use this particularly aggressive
plasma for cleaning have reported as much as a 200 percent improvement
in wafer yield since switching to Kalrez® Sahara™ 8085."
In processes where ultra-low particle generation
is critical, Kalrez® 8002 is an alternative to mineral-filled
products. It exhibits significantly lower particle generation
in oxygen and fluorine-based plasmas. In addition, KLR 9100, the
latest perfluoroelastomer product from DuPont Performance Elastomers,
has demonstrated excellent performance in a STI HDPCVD process
on Novellus Concept Two Speed® Equipment at a major Southwest
USA Fab line.
Performance Elastomers claims that Kalrez® Bonded Door Seals
outperform conventional O-rings in slit and gate valve door seal
applications, and also reduce rolling and twisting during door
actuation due to being held in a 'fixed' position. These innovations
can lead to extended seal life and reduced replacement time during
preventive maintenance, the company states.
"Kalrez® Bonded Door Seals have already
been adopted by several leading Fab lines to seal CVD, etch and
ashing processes for the key 200mm and 300mm wafer production
equipment platforms, and they report significant benefits,"
He cites a major Southwest USA Fab line that achieved
51 percent particle reduction by switching to Kalrez® Sahara™
8085 Bonded Door Seals in a tungsten CVD process.
Metaxas also reports that a leading European chip
manufacturer almost doubled wafer yield from about 30 000 to 55
000 pairs in a Producer® low-k Black Diamond® PECVD process
by switching to MONOVAT® bonded door seals with KLR 9100.
Kalrez® Sahara™ 8085, 8002 and KLR-9100
Bonded Door Seals are designed for HDPCVD, PECVD, SACVD, low-K
CVD and metal CVD as well as etch and ash wafer processing applications.
perfluoroelastomer parts manufacture
perfluoroelastomer parts are produced only by DuPont Performance
Elastomers and are specially cleaned and double packaged in Class
100 Workstations to significantly reduce the potential for contamination.
Each item is individually packaged in a bar coded bag for full
traceability and is available as O-rings, sheets, and custom parts.
[They are sold through DuPont Performance Elastomers' certified
distributor Problem Solving Products, Inc.]
DuPont Performance Elastomers
DuPont Performance Elastomers, a global supplier
of specialty elastomers with headquarters in Wilmington, DEL,
is a wholly owned subsidiary of DuPont. The company is an industry
leader in chloroelastomers and fluorinated elastomers, serving
the automotive, chemical, petrochemical, semiconductor, food and
pharmaceutical processing, construction, general rubber and wire
and cable industries.
is a registered trademark of DuPont.
Sahara™ is a registered trademark of DuPont.
Article: Article 5: Extended Role In Critical Chemical Process Sealing
For Kalrez® And Viton®